Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 1
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13 nm high-efficiency nickel-germanium soft x-ray zone plates
Reinspach, Julia, Lindblom, Magnus, Bertilson, Michael, von Hofsten, Olov, Hertz, Hans M., Holmberg, AndersVolume:
29
Année:
2011
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3520457
Fichier:
PDF, 650 KB
english, 2011