[IEEE 2008 8th IEEE Conference on Nanotechnology (NANO) - Arlington, Texas, USA (2008.08.18-2008.08.21)] 2008 8th IEEE Conference on Nanotechnology - Photoplastic NEMS with an Encapsulated Polysilicon Piezoresistor
Kale, Nitin S., Nag, Sudip, Pinto, R., Rao, V. RamgopalAnnée:
2008
Langue:
english
DOI:
10.1109/nano.2008.140
Fichier:
PDF, 989 KB
english, 2008