Sculpting of three-dimensional nano-optical structures in silicon
Koonath, Prakash, Kishima, Koichiro, Indukuri, Tejaswi, Jalali, BahramVolume:
83
Année:
2003
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1634384
Fichier:
PDF, 412 KB
english, 2003