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[IEEE 2012 7th International Forum on Strategic Technology (IFOST) - Tomsk, Russia (2012.09.18-2012.09.21)] 2012 7th International Forum on Strategic Technology (IFOST) - Titanium oxynitride thin films deposited by the reactive magnetron sputtering: Structure and physical-mechanical properties
Morozova, N., Konishchev, M., Pustovalova, A., Bykova, Yu., Grebneva, I., Kuzmin, O., Pichugin, V.Année:
2012
Langue:
english
DOI:
10.1109/ifost.2012.6357769
Fichier:
PDF, 418 KB
english, 2012