Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1993 / 5 Vol. 11; Iss. 3
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Reactions between molten aluminum and pyrolytic boron nitride crucibles
SpringThorpe, A. J.Volume:
11
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.587002
Date:
May, 1993
Fichier:
PDF, 950 KB
english, 1993