Preparation and phase structures of Zn–Ti–O ternary compounds by atomic layer deposition
Qian, Xu, Gao, Mo-Yun, Cao, Yan-Qiang, Guo, Bing-Lei, Li, Ai-DongVolume:
31
Année:
2013
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4769451
Fichier:
PDF, 1.45 MB
english, 2013