[ECS Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) - Munich, Germany (September 13 - September 14, 2007)] ECS Transactions - Wafer Contamination Analysis, Speciation and Reference-free Nanolayer Characterization using Synchrotron Radiation based X-ray Spectrometry
Beckhoff, Burkhard, Fliegauf, Rolf, Kolbe, Michael, Müller, Matthias, Pollakowski, Beatrix, Weser, Jan, Ulm, GerhardVolume:
10
Année:
2007
Langue:
english
DOI:
10.1149/1.2773975
Fichier:
PDF, 484 KB
english, 2007