Effect of transverse current injection during air annealing on the formation of oxides in thin Ti films
Parkansky, N., Alterkop, B., Goldsmith, S., Boxman, R. L., Rosenberg, Yu.Volume:
85
Année:
1999
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.369478
Fichier:
PDF, 323 KB
english, 1999