Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2003 Vol. 21; Iss. 6
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Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
Pedrak, R., Ivanov, Tzv., Ivanova, K., Gotszalk, T., Abedinov, N., Rangelow, I. W., Edinger, K., Tomerov, E., Schenkel, T., Hudek, P.Volume:
21
Année:
2003
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1614252
Fichier:
PDF, 700 KB
english, 2003