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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Low Temperature A-SiC/Si Direct Bonding Technology for MEMS/NEMS
Du, Jiangang, Zorman, Christian A.Année:
2007
Langue:
english
DOI:
10.1109/sensor.2007.4300573
Fichier:
PDF, 2.25 MB
english, 2007