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[IEEE High Density Packaging (ICEPT-HDP) - Xi'an, China (2010.08.16-2010.08.19)] 2010 11th International Conference on Electronic Packaging Technology & High Density Packaging - A novel approach to fabricate glass micro-objects for MEMS application
Boyin Chen,, Jintang Shang,, Di Zhang,, Chao Xu,, Junwen Liu,, Xinhu Luo,, Hui Yu,, Jingdong Liu,Année:
2010
Langue:
english
DOI:
10.1109/icept.2010.5582660
Fichier:
PDF, 916 KB
english, 2010