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Effects of showerhead hole structure on the deposition of hydrogenated microcrystalline silicon thin films by vhf PECVD
Wi, Sung-Suk, Kim, Yun-Gi, Lee, Ho-Jun, Kim, Daeil, Hwang, Doosup, Chang, Woo SokVolume:
30
Année:
2012
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4721287
Fichier:
PDF, 1.16 MB
english, 2012