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[IEEE 2008 33rd International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz 2008) - Pasadena, CA (2008.09.15-2008.09.19)] 2008 33rd International Conference on Infrared, Millimeter and Terahertz Waves - Observation of semiconductor test circuits after building-in defect using laser THz emission microscope
Yamashita, Masatsugu, Chiko Otani,, Toru Matsumoto,, Katsuyoshi Miura,, Koji Nakamae,, Masayoshi Tonouchi,, Kiyoshi Nikawa,Année:
2008
Langue:
english
DOI:
10.1109/icimw.2008.4665726
Fichier:
PDF, 431 KB
english, 2008