Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM
Yongzhong Jin, Wei Wu, Li Li, Jian Chen, Jingyu Zhang, Youbing Zuo, Jun FuVolume:
255
Année:
2009
Langue:
english
Pages:
7
DOI:
10.1016/j.apsusc.2008.12.029
Fichier:
PDF, 1.79 MB
english, 2009