Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 3
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Growth and structural characterization of epitaxial (La[sub 1−x]Lu[sub x])[sub 2]O[sub 3] layers grown on Si(111)
Watahiki, Tatsuro, Grosse, Frank, Kaganer, Vladimir M., Proessdorf, André, Braun, WolfgangVolume:
28
Année:
2010
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3382170
Fichier:
PDF, 417 KB
english, 2010