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Investigation and modeling of the infrared optical properties of direct current sputtered SiC films on silicon
Y. M. Lei, Y. H. Yu, L. L. Cheng, B. Sundaraval, E. Z. Luo, C. X. Ren, S. C. Zou, S. P. Wong, D. H. Chen, I. H. WilsonAnnée:
2000
Langue:
english
DOI:
10.1063/1.1286467
Fichier:
PDF, 447 KB
english, 2000