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Method for the study of semiconductor device operation using scanning capacitance microscopy
Nakakura, C. Y., Tangyunyong, P., Hetherington, D. L., Shaneyfelt, M. R.Volume:
74
Année:
2003
Langue:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1527722
Fichier:
PDF, 698 KB
english, 2003