[IEEE 2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT) - Penang, Malaysia (2008.11.4-2008.11.6)] 2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT) - A novel CMOS-compatible fabrication method for development of an electrostatically actuated micropump
Hing Wah Lee,, Buyong, Muhamad Ramdzan, Ismahadi Syono, Mohd., Azid, Ishak Hj. Abd.Année:
2008
Langue:
english
DOI:
10.1109/iemt.2008.5507836
Fichier:
PDF, 1.38 MB
english, 2008