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[IEEE 2014 72nd Annual Device Research Conference (DRC) - Santa Barbara, CA, USA (2014.6.22-2014.6.25)] 72nd Device Research Conference - The influence of NH3 plasma treatment on Al2O3/HfO2 gate dielectrics of TFTs with atmospheric pressure plasma jet deposited IGZO channel
Huang, Hau-Yuan, Wu, Chien-Hung, Wang, Shui-Jinn, Chang, Kow-Ming, Hsu, Hsin-YuAnnée:
2014
Langue:
english
DOI:
10.1109/drc.2014.6872347
Fichier:
PDF, 357 KB
english, 2014