Organosilicate polymer e-beam resists with high resolution, sensitivity and stability
Lee, Sung-Il, Sim, Jae Hwan, Lee, Hae-Jeong, Kasica, Richard, Kim, Hyun-Mi, Soles, Christopher L., Kim, Ki-Bum, Yoon, Do Y.Volume:
27
Langue:
english
Journal:
Applied Organometallic Chemistry
DOI:
10.1002/aoc.2985
Date:
November, 2013
Fichier:
PDF, 337 KB
english, 2013