Roles of oxidizing species in a nonequilibrium atmospheric-pressure pulsed remote O[sub 2]/N[sub 2] plasma glass cleaning process
Iwasaki, Masahiro, Matsudaira, Yuto, Takeda, Keigo, Ito, Masafumi, Miyamoto, Eiji, Yara, Takuya, Uehara, Tsuyoshi, Hori, MasaruVolume:
103
Année:
2008
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2830982
Fichier:
PDF, 985 KB
english, 2008