Direct patterning in ZnO film formation by surface discharge technique
Okuya, Masayuki, Nabeta, Keigo, Shibayama, Yoshihiro, Kanezashi, Shota, Tan, Masato, Iyoda, Masahiko, Shikatani, Masahiro, Sonohara, Yosuke, Yagi, IsaoVolume:
7
Langue:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.7.015501
Date:
January, 2014
Fichier:
PDF, 1.13 MB
english, 2014