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Editorial on the 30th anniversary of Microelectronic Engineering
Kern, Dieter, Pérez-Murano, Francesc, Choi, Jin-Woo, Vieu, Christophe, Gentili, Massimo, Takai, Mikio, Peckerar, Martin, Gogolides, EvangelosVolume:
132
Langue:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.11.016
Date:
January, 2015
Fichier:
PDF, 184 KB
english, 2015