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MD simulations of GaN sputtering by Ar[sup +] ions: Ion-induced damage and near-surface modification under continuous bombardment
Despiau-Pujo, Emilie, Chabert, PascalVolume:
28
Année:
2010
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3460904
Fichier:
PDF, 521 KB
english, 2010