Planar electrostatic micromotors on the basis of the ferroelectric films
Dyatlov, V. L., Kostsov, E. G.Volume:
23
Langue:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589908210146
Date:
July, 1999
Fichier:
PDF, 522 KB
english, 1999