
Atomic layer deposition of cobalt oxide thin films using cyclopentadienylcobalt dicarbonyl and ozone at low temperatures
Han, Byeol, Ha Choi, Kyu, Min Park, Jae, Woo Park, Jung, Jung, Jongwan, Lee, Won-JunVolume:
31
Année:
2013
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4772461
Fichier:
PDF, 906 KB
english, 2013