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[IEEE International Conference on Advanced Thermal Processing of Semiconductors - Charleston, NC, USA (23-26 Sept. 2003)] 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 - RTP of titanium boride for applications in front end processing
Zagozdzon-Wosik, W., Ranjit, R., Rusakova, I., van der Heide, P., Zhang, Z., Bennett, J.Année:
2003
Langue:
english
DOI:
10.1109/rtp.2003.1249150
Fichier:
PDF, 507 KB
english, 2003