Fabrication of free-standing microtransducers in GaAs with an electron-beam-induced oxide mask and Cl2 etching
P.C. Hoyle, J.R.A. Cleaver, H. AhmedVolume:
50
Année:
1995
Pages:
7
DOI:
10.1016/0924-4247(96)80082-3
Fichier:
PDF, 854 KB
1995