
Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates
Terry T.H. Eng, Sidney C. Kan, George K.L. WongVolume:
49
Année:
1995
Pages:
5
DOI:
10.1016/0924-4247(96)80026-4
Fichier:
PDF, 546 KB
1995