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Amorphous silicon carbide and its application in silicon micromachining
A. Klumpp, U. Schaber, H.L. Offereins, K. Kühl, H. SandmaierVolume:
41
Année:
1994
Langue:
english
Pages:
7
DOI:
10.1016/0924-4247(94)80129-0
Fichier:
PDF, 639 KB
english, 1994