Ultra-stable, high-temperature pressure sensors using silicon fusion bonding
Kurt Petersen, Joe Brown, Ted Vermeulen, Phillip Barth, Joseph Mallon Jr., Janusz BryzekVolume:
21
Année:
1990
Langue:
english
Pages:
6
DOI:
10.1016/0924-4247(90)85019-z
Fichier:
PDF, 627 KB
english, 1990