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[American Vacuum Soc 1999 4th International Symposium on Plasma Process-Induced Damage - Monterey, CA, USA (9-11 May 1999)] 1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395) - Process-induced damage by a low energy neutral beam source [etching/cleaning]
Xianmin Tang,, Qi Wang,, Manos, D.M.Année:
1999
Langue:
english
DOI:
10.1109/ppid.1999.798827
Fichier:
PDF, 203 KB
english, 1999