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Remarkable lattice recovery and low sheet resistance of phosphorus-implanted 4H–SiC (112̄0)
Negoro, Y., Miyamoto, N., Kimoto, T., Matsunami, H.Volume:
80
Année:
2002
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1432745
Fichier:
PDF, 372 KB
english, 2002