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High-performance polycrystalline silicon thin-film transistor with multiple nanowire channels and lightly doped drain structure
Wu, Yung-Chun, Chang, Ting-Chang, Chang, Chun-Yen, Chen, Chi-Shen, Tu, Chun-Hao, Liu, Po-Tsun, Zan, Hsiao-Wen, Tai, Ya-HsiangVolume:
84
Année:
2004
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1745104
Fichier:
PDF, 582 KB
english, 2004