X-ray photoelectron spectroscopy studies of thin films of TiNx having different annealing histories
Kaufherr, NuritVolume:
3
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.572953
Date:
September, 1985
Fichier:
PDF, 569 KB
english, 1985