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Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation
King, W.P., Kenny, T.W., Goodson, K.E., Cross, G.L.W., Despont, M., Durig, U.T., Rothuizen, H., Binnig, G., Vettiger, P.Volume:
11
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.803283
Date:
December, 2002
Fichier:
PDF, 688 KB
english, 2002