
Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
Senez, Vincent, Armigliato, Aldo, De Wolf, Ingrid, Carnevale, Gianpietro, Balboni, Roberto, Frabboni, Stefano, Benedetti, AlessandroVolume:
94
Année:
2003
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1611287
Fichier:
PDF, 700 KB
english, 2003