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Formation of alkylsiloxane self-assembled monolayers on Si[sub 3]N[sub 4]
Sung, Myung M., Kluth, G. Jonathan, Maboudian, RoyaVolume:
17
Année:
1999
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581616
Fichier:
PDF, 802 KB
english, 1999