Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 5
Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors
Dimitrakopoulos, Christos, Lin, Yu-Ming, Grill, Alfred, Farmer, Damon B., Freitag, Marcus, Sun, Yanning, Han, Shu-Jen, Chen, Zhihong, Jenkins, Keith A., Zhu, Yu, Liu, Zihong, McArdle, Timothy J., Ott,Volume:
28
Année:
2010
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3480961
Fichier:
PDF, 929 KB
english, 2010