[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks
Qinghua Chen,, Wengang Wu,, Haiyang Mao,, Bochao Du,, Li Li,, Yilong Hao,Année:
2010
Langue:
english
DOI:
10.1109/icsens.2010.5690306
Fichier:
PDF, 1.62 MB
english, 2010