[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Linz, Austria (2011.04.18-2011.04.20)] 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Investigation of thin films by nanoindentation with doe and numerical methods
Dowhan, Lukasz, Wymyslowski, Artur, Wittler, OlafAnnée:
2011
Langue:
english
DOI:
10.1109/esime.2011.5765768
Fichier:
PDF, 2.59 MB
english, 2011