[IEEE 2006 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2006.10.29-2006.12.1)] 2006 IEEE International Conference on Semiconductor Electronics - Characterization of Si3N4 Metal-Insulator-Metal (MIM) Capacitors for Monolithic Microwave Integrated Circuits (MMIC) Applications
Lee Hock Guan,, Osman, Mohd Nizam, Dolah, Asban, Rahim, Ahmad Ismat Abdul, Yahya, Mohamed Razman, Mat, Abdul Fatah AwangAnnée:
2006
Langue:
english
DOI:
10.1109/smelec.2006.380683
Fichier:
PDF, 2.04 MB
english, 2006
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