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[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - Transfer of patterned Si and SiO/sub 2/ layers for the fabrication of patterned and mixed SOI
Moriceau, H., Yalicheff, C., Gorla, C., Charvet, A.M., Morales, C., Zussy, M., Dechamp, J., Kernevez, N., Letertre, F., Ghyselen, B., Mazure, C., Lagahe-Blanchard, C., Aspar, B.Année:
2004
Langue:
english
DOI:
10.1109/soi.2004.1391617
Fichier:
PDF, 180 KB
english, 2004