[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - A novel method for photoresist stripping using ozone/de-ionized water chemistry
Kashkoush, I., Novak, R., Matthews, R.Année:
1997
Langue:
english
DOI:
10.1109/issm.1997.664630
Fichier:
PDF, 568 KB
english, 1997