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[IEEE 2014 15th International Conference on Electronic Packaging Technology (ICEPT) - Chengdu, China (2014.8.12-2014.8.15)] 2014 15th International Conference on Electronic Packaging Technology - Study of metal mask assisted TSV bottom the dielectric layer etching process
Dai, Fengwei, Niu, Zhongcai, Zhang, WenqiAnnée:
2014
Langue:
english
DOI:
10.1109/icept.2014.6922686
Fichier:
PDF, 930 KB
english, 2014