[IEEE CLEO 2007 - Baltimore, MD, USA (2007.5.6-2007.5.11)] 2007 Conference on Lasers and Electro-Optics (CLEO) - Effect of Pulse Shaping on Silicon Micromachining Monitored by Laser Induced Breakdown Spectroscopy and Surface Second Harmonic Generation
Gunaratne, Tissa C., Zhu, Xin, Lozovoy, Vadim, Dantus, MarcosAnnée:
2007
Langue:
english
DOI:
10.1109/cleo.2007.4452446
Fichier:
PDF, 279 KB
english, 2007