[IEEE 2011 8th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE 2011) - Merida City, Mexico (2011.10.26-2011.10.28)] 2011 8th International Conference on Electrical Engineering, Computing Science and Automatic Control - Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors
Mendoza-Acevedo, S., Reyes-Barranca, M. A.Année:
2011
Langue:
english
DOI:
10.1109/iceee.2011.6106689
Fichier:
PDF, 709 KB
english, 2011