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[IEEE 2004 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2004.12.7-2004.12.9)] 2004 IEEE International Conference on Semiconductor Electronics - Application of Auger electron spectroscopy (AES), TEM electron energy loss spectrum (EELS) in failure analysis on poly grooves issue in wafer fabrication
Phong Ooi Lin,, Ang Ghim Boon,, Chua Kok Keng,, Oh Chong Khiam,, Lo Keng Foo,Année:
2004
Langue:
english
DOI:
10.1109/smelec.2004.1620894
Fichier:
PDF, 2.97 MB
english, 2004