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[IEEE 2008 16th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Las Vegas, NV, USA (2008.09.30-2008.10.3)] 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Characterization of deformation induced by micro-second laser anneal using CGS interferometry
Owen, David M., Yun Wang,, Hawryluk, Andy, Senquan Zhou,, Hebb, JeffAnnée:
2008
Langue:
english
DOI:
10.1109/RTP.2008.4690546
Fichier:
PDF, 3.40 MB
english, 2008