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[IEEE 2013 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Hsinchu (2013.4.22-2013.4.24)] 2013 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Self-align nitride based logic NVM in 28nm high-k metal gate CMOS technology
Lin, P. Y., Yang, T. H., Sung, Y. T., Lin, C. J., King, Y. C., Chang, T. S.Année:
2013
Langue:
english
DOI:
10.1109/vlsi-tsa.2013.6545594
Fichier:
PDF, 685 KB
english, 2013